Sample base, charged particle beam device and sample observation method
US9508527B2 · kind B2 · utility
5Cited by
5References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 26, 2013 |
| Grant date | Nov 29, 2016 |
| Priority date | — |
| Expiry date | Nov 26, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2801
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
This charged particle beam device irradiates a primary charged particle beam generated from a charged particle microscope onto a sample arranged on a light-emitting member that makes up at least a part of a sample base, and, in addition to obtaining charged particle microscope images by the light-emitting member detecting charged particles transmitted through or scattered inside the sample, obtains optical microscope images by means of an optical microscope while the sample is still arranged on the sample platform.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.