Method of studying a cryogenic sample in an optical microscope

US9512460B2 · kind B2 · utility

Assignee

• FEI Company · US

Inventors

• Tobias Mayer · Hamburg, DE
• Rainer Daum · Weßling, DE
• Matthias Geisbauer · Karlsfeld, DE
• Rudolf Johannes Peter Gerardus Schampers · Tegelen, NL
• Johannes Antonius Hendricus Wilhelmus Gerardus Persoon · Waalre, NL

Key dates

• Filing date: Mar 4, 2014
• Grant date: Dec 6, 2016
• Expiry date: Apr 7, 2034

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B27/0006
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

The present invention relates to a method of studying a sample using an optical microscope, comprising providing the sample in a sample holder with means to maintain the sample at a temperature below 273 K; providing a microscope objective lens, in a thermally insulating jacket, having an extremal lens element proximal to the sample holder; bringing the lens into a focus position proximal to the sample, which separates the extremal lens element and sample by an intervening space, providing a transparent window in said intervening space, with a gap between the window and the extremal lens element; providing a flow of substantially dry gas in said gap; and tailoring the geometry and velocity of said flow so that, at least in said gap, the flow is non-laminar; and does not excite substantial acoustic vibration in a structure proximal the gap.