Patent · US Active

Photoacoustic gas sensor device and a method for analyzing gas

US9513261B2 · kind B2 · utility

14Cited by

6References

17Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Alfons Dehe · Reutlingen, DE
Stefan Kolb · Unterschleißheim, DE
Horst Theuss · Wenzenbach, DE

Key dates

Filing date	Oct 14, 2013
Grant date	Dec 6, 2016
Priority date	—
Expiry date	Dec 27, 2034

Classification

Technology area (CPC G)Physics
CPC primaryG01N2291/021
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A photoacoustic gas sensor device for analyzing gas includes an emitter module and a pressure-sensitive module. The emitter module is arranged on a carrier substrate and emits light pulses. The pressure-sensitive module is arranged on the carrier substrate within a reference gas volume. The reference gas volume is separated from a volume intended to be filled with a gas to be analyzed. Further, the pressure-sensitive module generates a sensor signal indicating information on an acoustic wave caused by light pulses emitted by the emitter module interacting with a reference gas within the reference gas volume. Additionally, the emitter module is arranged so that light pulses emitted by the emitter module reach the reference gas volume after crossing the volume intended to be filled with the gas to be analyzed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.