Patent · US Active

Three-dimensional semiconductor memory device

US9515087B2 · kind B2 · utility

23Cited by
4References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 8, 2015
Grant dateDec 6, 2016
Priority date
Expiry dateOct 8, 2035

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10B41/20
  • WIPO fieldComputer technology
  • WIPO sectorElectrical engineering

Abstract

A three-dimensional (3D) semiconductor memory device that includes a peripheral logic structure including peripheral logic circuits disposed on a semiconductor substrate and a first insulation layer overlapping the peripheral logic circuits, and a plurality of memory blocks spaced apart from each other on the peripheral logic structure. At least one of the memory blocks includes a well plate electrode, a semiconductor layer in contact with a first surface of the well plate electrode, a stack structure including a plurality of electrodes vertically stacked on the semiconductor layer, and a plurality of vertical structures penetrating the stack structure and connected to the semiconductor layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.