Patent · US Active

Opto-electronic inspection quality assurance system for fluid dispensing valves

US9518933B2 · kind B2 · utility

0Cited by
5References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 12, 2013
Grant dateDec 13, 2016
Priority date—
Expiry dateOct 12, 2033

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N2201/062
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

An optoelectronic inspection system useful for quality assurance determinations of fluid dispensing valves, e.g., as installed on fluid storage and dispensing vessels, and associated methodology and non-transitory computer readable media storing machine-executable instructions for such quality assurance determinations, are described. The optoelectronic inspection is applicable to flow control valves used on fluid storage and dispensing packages including physical adsorbent-based and/or pressure-regulated vessels, such as are used for supply of processing fluids used in the manufacture of semiconductor products, flat panel displays, and solar panels.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.