Image sensor illuminated and connected on its back side

US9520435B2 · kind B2 · utility

Assignees

• STMicroelectronics SA
• STMicroelectronics (Crolles 2) SAS · FR

Inventors

• Nayera Ahmed · Crolles, FR
• Michel Marty · Buc, FR

Key dates

• Filing date: Aug 31, 2015
• Grant date: Dec 13, 2016
• Expiry date: Aug 31, 2035

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10F39/807

Abstract

An image sensor including a semiconductor layer; a stack of insulating layers resting on the back side of the semiconductor layer; a conductive layer portion extending along part of the height of the stack and flush with the exposed surface of the stack; laterally-insulated conductive fingers extending through the semiconductor layer from its front side and penetrating into said layer portion; laterally-insulated conductive walls separating pixel areas, these walls extending through the semiconductor layer from its front side and having a lower height than the fingers; and an interconnection structure resting on the front side of the semiconductor layer and including vias in contact with the fingers.