Patent · US Active

Semiconductor device having gradient implant region and manufacturing method thereof

US9520471B1 · kind B1 · utility

2Cited by
0References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 17, 2015
Grant dateDec 13, 2016
Priority date
Expiry dateNov 17, 2035

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D62/107
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A semiconductor device includes a substrate having a first conductivity type, a high-voltage well having a second conductivity type and disposed in the substrate, a source well having the first conductivity type disposed in the high-voltage well, a drift region disposed in the high-voltage well and spaced apart from the source well, and a gradient implant region having the second conductivity type and disposed in the high-voltage well between the source well and the drift region.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.