Manufacturable multi-emitter laser diode

US9520697B2 · kind B2 · utility

Assignee

• Soraa Laser Diode, Inc. · US

Inventors

• Dan Steigerwald · Cupertino, US
• Melvin McLaurin · Midland School, US
• Eric Goutain · Fremont, US
• Alexander Sztein · Goleta, US
• Po Shan Hsu · Arcadia, US
• Paul Rudy · Goleta, US
• James W. Raring · Lompoc, US

Key dates

• Filing date: Jan 20, 2015
• Grant date: Dec 13, 2016
• Expiry date: Jan 20, 2035

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01S5/4056
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A method for manufacturing a multi-emitter laser diode device includes providing a substrate having a surface region and forming epitaxial material overlying the surface region, the epitaxial material comprising an n-type cladding region, an active region comprising at least one active layer overlying the n-type cladding region, and a p-type cladding region overlying the active layer region. The epitaxial material is patterned to form a plurality of dice, each of the dice corresponding to at least one laser device, characterized by a first pitch between a pair of dice, the first pitch being less than a design width. Each of the plurality of dice are transferred to a carrier wafer such that each pair of dice is configured with a second pitch between each pair of dice, the second pitch being larger than the first pitch.