Method and apparatus for gas flow control
US9523435B2 · kind B2 · utility
4Cited by
81References
16Claims
0Family size
Assignee
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Key dates
| Filing date | Sep 2, 2014 |
| Grant date | Dec 20, 2016 |
| Priority date | — |
| Expiry date | Sep 2, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/8275
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A method and apparatus for self-calibrating control of gas flow. The gas flow rate is initially set by controlling, to a high degree of precision, the amount of opening of a flow restriction, where the design of the apparatus containing the flow restriction lends itself to achieving high precision. The gas flow rate is then measured by a pressure rate-of-drop upstream of the flow restriction, and the amount of flow restriction opening is adjusted, if need be, to obtain exactly the desired flow.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.