Probe guide plate and method for manufacturing the same
US9523716B2 · kind B2 · utility
0Cited by
8References
11Claims
0Family size
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Key dates
| Filing date | Mar 10, 2014 |
| Grant date | Dec 20, 2016 |
| Priority date | — |
| Expiry date | Aug 7, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/07371
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
There is provided a probe guide plate. The probe guide plate includes: a substrate having a through hole for guiding a probe, which is formed through the substrate, wherein the substrate includes a first main surface and a second main surface opposite to the first main surface; and a first insulating film formed on an inner wall of the through hole and on the first and second main surfaces of the substrate such that portions of the first and second main surfaces of the substrate are exposed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.