Cavity resonator of microwave plasma generating apparatus
US9526160B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 27, 2013 |
| Grant date | Dec 20, 2016 |
| Priority date | — |
| Expiry date | May 27, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H1/4622
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A resonator body 1 comprises a square-tube-shaped side wall 2 with upper and lower walls. A cavity 5 is formed in the resonator body. The side wall has a microwave supply opening 6. A wave guide 7 is connected to the microwave supply opening through an inductive window 13. The upper and lower walls have reaction tube attachment openings 3a, 4a. A reaction tube 8 is attached to the reaction tube attachment openings and extends vertically through the cavity and cross an axis of the wave guide. Square tubes 10a-10b made of non-magnetic metal meshes are arranged concentrically to the resonator body and in nested manner in the cavity at a distance from both the interior surface of the side wall and the reaction tube.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.