Adtec Plasma Technology Co., Ltd.
6Patents
5Active
6Granted
48Portfolio score
Filing activity: Dec 26, 2003 → Nov 22, 2021 · 2 expiring within 5 years
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7514377B2 | Plasma generator, ozone generator, substrate processing apparatus and manufacturing method of semiconductor device | Electricity | 18 | Expired |
| US7858899B2 | Coaxial microwave plasma torch | Electricity | 6 | Active |
| US7795818B2 | Microwave plasma generation method and microwave plasma generator | Electricity | 1 | Active |
| US11875968B2 | High frequency power source allowing arbitrary setting of temporal change pattern for high frequency output power | Electricity | 0 | Active |
| US9526160B2 | Cavity resonator of microwave plasma generating apparatus | Electricity | 0 | Active |
| US11651938B2 | Impedance matching device provided in high-frequency power system | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.