Patent · US Active

Methods and devices for correcting errors in atomic force microscopy

US9527732B2 · kind B2 · utility

2Cited by

20References

17Claims

0Family size

Assignee

Seagate Technology LLC · US

Inventors

Huiwen Liu · Hefei, CN
Peter Gunderson · Ellsworth, US
Lin Zhou · Beijing, CN

Key dates

Filing date	Jul 26, 2011
Grant date	Dec 27, 2016
Priority date	—
Expiry date	Jan 2, 2034

Classification

Technology area (CPC G)Physics
CPC primaryG01Q10/06
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

In certain embodiments, a probe scans a surface to produce a first scan. The first scan is used to estimate a vertical offset for scanning the surface to produce a second scan. In certain embodiments, an AFM device engages a probe to a surface using a piezo voltage. The probe scans the surface to produce a first scan. The first scan is used to estimate a vertical offset such that the probe uses the piezo voltage to engage the surface for a second scan at a different vertical position.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.