Microelectromechanical and/or nanoelectromechanical differential pressure measurement sensor
US9528895B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 18, 2015 |
| Grant date | Dec 27, 2016 |
| Priority date | — |
| Expiry date | Jun 23, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0086
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
MEMS and/or NEMS differential pressure measurement sensor comprising at least one first membrane and at least one second membrane, each suspended from a substrate, the first membrane having a face subjected to a reference pressure and a second face subjected to a first pressure to be detected, the second membrane having a first face subjected to the reference pressure and a second face subjected to a second pressure to be detected, a rigid beam of longitudinal axis articulated with respect to the substrate by a pivot link around an axis, said beam being solidly connected by a first zone to the first membrane and by a second zone to the second membrane such that the pivot link is situated between the first zone and the second zone of the beam, a sensor of measuring the movement of the beam around the axis, said sensor being arranged at least in part on the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.