Substrate carrier system for moving substrates in a vertical oven and method for processing substrates

US9530678B2 · kind B2 · utility

Assignee

• Infineon Technologies AG · DE

Inventors

• Andreas Stefaner · Pörtschach am Wörther See, AT
• Heimo Schieder · Arnoldstein, AT
• Guenter Denifl · Annenheim, AT
• Roland Moennich · Klagenfurt, AT
• Anton Winkler · Freising, DE

Key dates

• Filing date: Jul 28, 2014
• Grant date: Dec 27, 2016
• Expiry date: Oct 2, 2034

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/67757
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

A substrate carrier system for moving substrates in a vertical oven and a method for processing substrates are disclosed. In some embodiments, a method for oxidizing material or depositing material includes carrying a plurality of substrates by a substrate carrier and inserting the substrate carrier into a vertical oven, wherein the plurality of substrates are held by the substrate carrier in predefined positions, wherein an angle measured between a main surface of a substrate of the plurality of substrates at one of the predefined positions and a vertical direction is less than 20 degrees. The method further includes oxidizing a material on the plurality of substrates or depositing a material onto the plurality of substrates.