Imprint apparatus and article manufacturing method
US9535321B2 · kind B2 · utility
1Cited by
1References
24Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 11, 2011 |
| Grant date | Jan 3, 2017 |
| Priority date | — |
| Expiry date | Mar 9, 2032 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB82Y40/00
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
The imprint apparatus of the present invention molds an uncured resin on a substrate using a mold to form a resin pattern on the substrate. The apparatus includes a measuring device configured to project a light onto the mold, to receive a light scattered by the mold, and to measure the scattered light; and a controller. The controller is configured to store a reference signal, to cause the measuring device to measure the mold to obtain a measurement signal, and to obtain an index indicating a discrepancy between the measurement signal and the reference signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.