Hironori Maeda
37Patents
4h-index
31Co-inventors
63Inventor score
Filing activity: Aug 15, 2000 → Feb 9, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8842294B2 | Position detection apparatus, imprint apparatus, and position detection method | Emerging Cross-Sectional Technologies | 23 | Active |
| US9283720B2 | Position detection apparatus, imprint apparatus, and position detection method | Emerging Cross-Sectional Technologies | 18 | Active |
| US6725449B1 | Semiconductor test program debugging apparatus | Physics | 10 | Expired |
| US8922786B2 | Detector, imprint apparatus, and article manufacturing method | Physics | 7 | Active |
| US7580116B2 | Exposure apparatus and device fabrication method | Physics | 4 | Active |
| US9785542B2 | Implementing edit and update functionality within a development environment used to compile test plans for automated semiconductor device testing | Physics | 2 | Active |
| US9523927B2 | Exposure apparatus with detection apparatus for detection of upper and lower surface marks, and device manufacturing method | Physics | 2 | Active |
| US9939741B2 | Lithography apparatus, and method of manufacturing article | Physics | 2 | Active |
| US9400436B2 | Detection device, exposure apparatus, and device manufacturing method using same | Physics | 2 | Active |
| US10656541B2 | Measurement apparatus, exposure apparatus, and method of manufacturing article | Electricity | 1 | Active |
| US8185339B2 | Test method and program product used therefor | Physics | 1 | Active |
| US8049891B2 | Adjustment method for position detection apparatus, exposure apparatus, and device fabrication method | Physics | 1 | Active |
| US11231573B2 | Position detection apparatus, exposure apparatus, and article manufacturing method | Physics | 1 | Active |
| US9535321B2 | Imprint apparatus and article manufacturing method | Performing Operations; Transporting | 1 | Active |
| US9061959B2 | Method for manufacturing optically active menthol | Chemistry; Metallurgy | 1 | Active |
| US9000192B2 | Catalyst for asymmetric hydrogenation and method for manufacturing optically active carbonyl compound using the same | Chemistry; Metallurgy | 1 | Active |
| US8810772B2 | Position detector, position detection method, exposure apparatus, and method of manufacturing device to align wafer by adjusting optical member | Physics | 1 | Active |
| US11407703B2 | Method for converting hydroxyl group of alcohol | Chemistry; Metallurgy | 0 | Active |
| US8394320B2 | Method of preserving biomaterial | Human Necessities | 0 | Active |
| US8550711B2 | Treatment table system | Human Necessities | 0 | Active |
| US8345221B2 | Aberration measurement method, exposure apparatus, and device manufacturing method | Physics | 0 | Active |
| US9645514B2 | Imprint apparatus, imprint method, and device manufacturing method | Physics | 0 | Active |
| US11377411B2 | Method for producing 3-methylcycloalkenone compound | Chemistry; Metallurgy | 0 | Active |
| US7888513B2 | Condensation reaction by metal catalyst | Performing Operations; Transporting | 0 | Active |
| US9188855B2 | Imprint apparatus, imprint method, and device manufacturing method | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.