Multi-beam particle microscope and method for operating same

US9536702B2 · kind B2 · utility

Assignee

• Carl Zeiss Microscopy GmbH · DE

Inventors

• Uwe Lang · Taunusstein, DE
• Christian Crueger · Gerstetten, DE
• Nico Kaemmer · Königsbronn, DE
• Christof Riedesel · Oberkochen, DE

Key dates

• Filing date: May 28, 2015
• Grant date: Jan 3, 2017
• Expiry date: May 28, 2035

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J2237/2806
• WIPO field: Electrical machinery, apparatus, energy
• WIPO sector: Electrical engineering

Abstract

A multi-beam particle microscope includes first particle optics in order to direct particle beams onto an object, a detector with detection regions, with a transducer being assigned to each detection region, and a data acquisition system, which has a control computer system, image recording computer systems and a screen. The image recording computer systems receive electrical signals from the transducers and generates a first file, which represents a high resolution image, and a second file, which represents a low resolution image. The control computer system maintains a data structure which represents an assignment of transducers to two-dimensional spatial vectors and depicts the images on the screen, wherein a reference point in each image is arranged on the screen in a coordinate system of the screen at a location which is defined by a sum of a leading vector, which is the same for all images, and the spatial vector.