Method for EUV power improvement with fuel droplet trajectory stabilization
US9538628B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 11, 2015 |
| Grant date | Jan 3, 2017 |
| Priority date | — |
| Expiry date | Jun 11, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05G2/0082
- WIPO fieldMedical technology
- WIPO sectorInstruments
Abstract
The present disclosure relates to an extreme ultraviolet (EUV) radiation source that generates charged tin droplets having a trajectory controlled by an electromagnetic field, and an associated method. In some embodiments, the EUV radiation source has a laser that generates a laser beam. A charged fuel droplet generator provides a plurality of charged fuel droplets having a net electrical charge to an EUV source vessel. An electromagnetic field generator generates an electric field and/or a magnetic field. The net electrical charge of the charged fuel droplets causes the electric or magnetic field to generate a force on the charged fuel droplets that controls a trajectory of the charged fuel droplets to intersect the laser beam. By using the electric or magnetic field to control a trajectory of the charged fuel droplets, the EUV system is able to avoid focus issues between the laser beam and the charged fuel droplets.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.