Aromatic resins for underlayers
US9540476B2 · kind B2 · utility
1Cited by
5References
13Claims
0Family size
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Key dates
| Filing date | Dec 12, 2014 |
| Grant date | Jan 10, 2017 |
| Priority date | — |
| Expiry date | Dec 12, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/31144
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Polymeric reaction products of certain aromatic alcohols with certain aromatic aldehydes are useful as underlayers in semiconductor manufacturing processes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.