Metrology target indentification, design and verification
US9546946B2 · kind B2 · utility
2Cited by
10References
16Claims
0Family size
Assignee
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Key dates
| Filing date | Mar 28, 2014 |
| Grant date | Jan 17, 2017 |
| Priority date | — |
| Expiry date | Sep 6, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG10K2210/129
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Metrology tools are provided, which comprise both active and passive vibration isolation devices, passive or active isolation systems such as constrained layer dampers, particle impact dampers or liquid impact dampers, and/or noise cancellation transducers, combined in different supporting structures of the metrology tool to dampen and reduce vibrations at a wide range of frequencies and intensities, and to which frequency range spectral analysis and optimization may be applied to determine specific tool configurations according to the provided principles.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.