Inventor · Cupertino, CA, US

Noam Sapiens

45Patents
8h-index
55Co-inventors
74Inventor score

Filing activity: Jul 21, 2010 → May 9, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US9518916B1 Compressive sensing for metrology Physics 23 Active
US9739702B2 Symmetric target design in scatterometry overlay metrology Physics 22 Active
US8681413B2 Illumination control Physics 13 Active
US9581430B2 Phase characterization of targets Physics 12 Active
US10072921B2 Methods and systems for spectroscopic beam profile metrology having a first two dimensional detector to detect collected light transmitted by a first wavelength dispersive element Physics 10 Active
US9784690B2 Apparatus, techniques, and target designs for measuring semiconductor parameters Physics 9 Active
US9816810B2 Measurement of multiple patterning parameters Physics 9 Active
US9490182B2 Measurement of multiple patterning parameters Physics 8 Active
US9104120B2 Structured illumination for contrast enhancement in overlay metrology Physics 8 Active
US10101676B2 Spectroscopic beam profile overlay metrology Physics 7 Active
US10365211B2 Systems and methods for metrology beam stabilization Physics 5 Active
US10401738B2 Overlay metrology using multiple parameter configurations Physics 5 Active
US8582114B2 Overlay metrology by pupil phase analysis Physics 5 Active
US8848186B2 Angle-resolved antisymmetric scatterometry Physics 5 Active
US10591406B2 Symmetric target design in scatterometry overlay metrology Physics 4 Active
US9164397B2 Optics symmetrization for metrology Physics 4 Active
USD933829S1 Automated personal vision tracker General 3 Active
US10612916B2 Measurement of multiple patterning parameters Physics 2 Active
US9915524B2 Optical metrology with small illumination spot size Physics 2 Active
US10588507B2 Optical method to assess the refractive properties of an optical system Human Necessities 2 Active
US10648796B2 Optical metrology with small illumination spot size Physics 2 Active
US9546946B2 Metrology target indentification, design and verification Physics 2 Active
US9739719B2 Measurement systems having linked field and pupil signal detection Physics 2 Active
US10062157B2 Compressive sensing for metrology Physics 1 Active
US10107765B2 Apparatus, techniques, and target designs for measuring semiconductor parameters Physics 1 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.