Temperature compensation in a CMUT device
US9550211B2 · kind B2 · utility
10Cited by
3References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 6, 2012 |
| Grant date | Jan 24, 2017 |
| Priority date | — |
| Expiry date | Oct 22, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49005
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
CMUT devices are used in many applications e.g. for ultrasound imaging and pressure measurement. These devices operate by sensing a change in capacitance caused by deflection of a membrane (32) comprising one of a pair of electrodes in the device by ultrasound exposure of or pressure applied on, the membrane. The CMUT device may be susceptible to the effects of changing temperature.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.