Angle calibration for grazing-incidence X-ray fluorescence (GIXRF)
US9551677B2 · kind B2 · utility
21Cited by
22References
20Claims
0Family size
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Key dates
| Filing date | Nov 27, 2014 |
| Grant date | Jan 24, 2017 |
| Priority date | — |
| Expiry date | Jun 24, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2223/6116
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method includes directing an X-ray beam to be incident at a grazing angle on a location on a surface of the sample. An X-ray fluorescence excited at the location is measured. A reflection angle of the X-ray beam from the surface and a transmission angle of the X-ray beam are measured. An angle of incidence of the X-ray beam on the surface is evaluated using the measured reflection and transmission angles, and the measured X-ray fluorescence is analyzed using the evaluated angle of incidence.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.