Pressure sensor with geter embedded in membrane
US9557238B2 · kind B2 · utility
3Cited by
9References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 25, 2014 |
| Grant date | Jan 31, 2017 |
| Priority date | — |
| Expiry date | Dec 31, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/04
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Various exemplary embodiments relate to a pressure sensor including a pressure sensitive membrane suspended over a cavity, wherein the membrane is secured by a set of anchors to a substrate; and a getter material embedded in the membrane, wherein the surface of the getter is in contact with any gas within the cavity, and wherein two end points of the getter material are attached through the substrate by anchors capable of conducting through the substrate an electrical current through the getter material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.