Inspection method of vitreous silica crucible
US9557276B2 · kind B2 · utility
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16Claims
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Key dates
| Filing date | Jun 30, 2013 |
| Grant date | Jan 31, 2017 |
| Priority date | — |
| Expiry date | Jun 30, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/12
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An inspection method of vitreous silica crucibles includes: a measurement step of measuring an infrared absorption spectrum or a Raman shift of a measurement point on an inner surface of the vitreous silica crucible; a determining step of predicting whether or not a surface-defect region occurs at the measurement point based on an obtained spectrum to determine a quality of the vitreous silica crucible.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.