Method, system, and computer program product for detection of defects based on multiple references
US9558548B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 12, 2015 |
| Grant date | Jan 31, 2017 |
| Priority date | — |
| Expiry date | Jul 29, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30148
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A system includes a memory and a processor device operatively coupled to the memory to obtain an inspected noise-indicative value representative of an analyzed pixel of an inspected image of an inspected object, and a reference noise-indicative value representative for each of multiple reference pixels of the inspected image. The processor device computes a representative noise-indicative value based on the inspected noise-indicative value and multiple reference noise-indicative values, calculates a defect-indicative value based on an inspected value representative of the analyzed pixel and determines a presence of a defect in the analyzed pixel based on the representative noise-indicative value and the defect-indicative value.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.