System and method for imaging a sample with a laser sustained plasma illumination output
US9558858B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 13, 2014 |
| Grant date | Jan 31, 2017 |
| Priority date | — |
| Expiry date | Nov 19, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG21K5/00
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
The inspection of a sample with VUV light from a laser sustained plasma includes generating pumping illumination including a first selected wavelength, or range of wavelength, containing a volume of gas suitable for plasma generation, generating broadband radiation including a second selected wavelength, or range of wavelengths, by forming a plasma within the volume of gas by focusing the pumping illumination into the volume of gas, illuminating a surface of a sample with the broadband radiation emitted from the plasma via an illumination pathway, collecting illumination from a surface of the sample, focusing the collected illumination onto a detector via a collection pathway to form an image of at least a portion of the surface of the sample and purging the illumination pathway and/or the collection pathway with a selected purge gas.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.