Material handling with dedicated automated material handling system
US9558978B2 · kind B2 · utility
4Cited by
16References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 1, 2013 |
| Grant date | Jan 31, 2017 |
| Priority date | — |
| Expiry date | Aug 17, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49826
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An apparatus includes a dedicated material handling module having a dedicated automated material handling system (AMHS) defines a transport route between a first tool and a second tool selected from a plurality of tools in a fabrication facility. The dedicated AMHS is configured to transport wafer carriers between the first tool and the second tool or vice versa independent of a fabrication facility AMHS that is configured to transport wafer carriers among the plurality of tools.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.