Inventor · Haifa, IL

Amir Widmann

19Patents
7h-index
37Co-inventors
62Inventor score

Filing activity: Jan 21, 2003 → Apr 27, 2020

Most-cited inventions

PatentTitleAreaCited byStatus
US8175831B2 Methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafers Electricity 34 Active
US8559001B2 Inspection guided overlay metrology Electricity 27 Active
US7561282B1 Techniques for determining overlay and critical dimension using a single metrology tool Physics 26 Active
US8111376B2 Feedforward/feedback litho process control of stress and overlay Physics 19 Active
US9116442B2 Feedforward/feedback litho process control of stress and overlay Physics 15 Active
US7925486B2 Computer-implemented methods, carrier media, and systems for creating a metrology target structure design for a reticle layout Physics 12 Active
US9170209B1 Inspection guided overlay metrology Electricity 9 Active
US6864458B2 Iced film substrate cleaning Electricity 6 Expired
US9329033B2 Method for estimating and correcting misregistration target inaccuracy Physics 6 Active
US8948495B2 Inspecting a wafer and/or predicting one or more characteristics of a device being formed on a wafer Physics 5 Active
US9558978B2 Material handling with dedicated automated material handling system Emerging Cross-Sectional Technologies 4 Active
US8045786B2 Waferless recipe optimization Physics 4 Active
US8655469B2 Advanced process control optimization Physics 3 Active
US8804137B2 Unique mark and method to determine critical dimension uniformity and registration of reticles combined with wafer overlay capability Electricity 2 Active
US9576861B2 Method and system for universal target based inspection and metrology Physics 2 Active
US10649447B2 Methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafers Electricity 1 Active
US7679069B2 Method and system for optimizing alignment performance in a fleet of exposure tools Physics 1 Active
US11498189B2 Wrench Performing Operations; Transporting 0 Active
US9651943B2 Methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafers Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.