Patent · US Active

Controlled radical assisted polymerization

US9561523B2 · kind B2 · utility

1Cited by
0References
13Claims
0Family size

Assignee

Inventor

Key dates

Filing dateJan 9, 2013
Grant dateFeb 7, 2017
Priority date
Expiry dateMar 7, 2033

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01J2237/332
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

The present invention is directed to a method of forming a polymer coating on a substrate. The method comprising the steps of providing in an evacuated reaction chamber a substrate having a surface to be coated; and providing a first source of polymer forming material and a second source of radicals. According to the invention the first source and the second source are separated from each other and from the reaction chamber, and the polymer forming material as well as the radicals are, at least temporarily, conducted contemporaneously but spatially separated to the substrate's surface, so that a reaction of the polymer forming material with the radicals is avoided before they reach the substrate's surface. Further, the present invention is directed to a device for carrying out the method according to the invention.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.