Continuously scanning XY translation stage
US9561566B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 15, 2011 |
| Grant date | Feb 7, 2017 |
| Priority date | — |
| Expiry date | Jun 13, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
An XY translation stage includes a primary drive mechanism and a stage drive assembly. The primary drive mechanism rotates the stage drive assembly about an axis of rotation. The XY translation stage also includes an object stage that orbits freely in a defined plane without rotation of the object stage out of that defined plane. A stage pin associates the stage drive assembly with the object stage such that rotational movement of the stage drive assembly yields orbital movement of the object stage within the defined plane. The positioning of the stage pin relative to the axis of rotation is adjustable such that the diameter of the orbital movement of the object stage is adjustable.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.