Patent · US Active

Metal hardmask compositions

US9562169B2 · kind B2 · utility

7Cited by
6References
15Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 25, 2015
Grant dateFeb 7, 2017
Priority date—
Expiry dateJun 25, 2035

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L21/0332
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

The invention provides a composition comprising at least the following A and B:

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.