Hybrid charged-particle beam and light beam microscopy
US9564291B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 17, 2015 |
| Grant date | Feb 7, 2017 |
| Priority date | — |
| Expiry date | Jun 17, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/28
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A charged-particle beam microscope is provided for imaging a sample. The microscope has a stage to hold a sample and a charged-particle beam column to direct a charged-particle beam onto the sample. The charged-particle beam column includes a charged-particle beam source to generate a charged-particle beam, and charged-particle beam optics to converge the charged-particle beam onto the sample. The microscope also has a light beam column to direct a light beam onto the sample. The light beam column includes a light beam source to generate a light beam, and light-beam optics to converge the light beam onto the sample. One or more detectors are provided to detect charged-particle and light radiation emanating from the sample to generate an image. A controller to analyze the detected charged-particle radiation and detected light radiation to generate an image of the sample.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.