Micromechanical component

US9567212B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Julian Gonska · Reutlingen, DE
• Jochen Reinmuth · Reutlingen, DE
• Kathrin Gutsche · Oberhausen, DE
• Jens Frey · Echterdingen, DE
• Heribert Weber · Leverkusen, DE

Key dates

• Filing date: Oct 24, 2013
• Grant date: Feb 14, 2017
• Expiry date: Oct 24, 2033

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81C2203/035
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

A micromechanical component includes a first space in which a first sensor is situated and a second space in which a second sensor is situated, different pressures prevailing in the first and second spaces, one of the two spaces extending via a third space to a first lattice structure which is situated in an edge region of the component and is essentially hermetically sealed.