Undercoat agent and method of producing structure containing phase-separated structure
US9567477B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 7, 2014 |
| Grant date | Feb 14, 2017 |
| Priority date | — |
| Expiry date | Nov 13, 2034 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC09D153/02
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
An undercoat agent used for phase separating a layer containing a block copolymer having a block of a structural unit derived from an (α-substituted) acrylate ester on a substrate, and which contains a resin component including a structural unit represented by formula (ba0-1), and/or a structural unit represented by formula (ba0-2), and a structural unit (ba0-3) having a substrate interacting group,wherein R represents a hydrogen atom, an alkyl group of 1 to 5 carbon atoms or a halogenated alkyl group of 1 to 5 carbon atoms, R1 and R2 represent a halogen atom or an organic group of 1 to 20 carbon atoms which may contain an oxygen atom, a halogen atom, or a silicon atom, and n is 1 to 5.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.