Optical apparatus, projection optical system, exposure apparatus, and method of manufacturing article
US9568729B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 22, 2014 |
| Grant date | Feb 14, 2017 |
| Priority date | — |
| Expiry date | Mar 18, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70266
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention provides an optical apparatus for deforming a reflecting surface of a mirror, comprising a base plate, a plurality of first actuators each configured to apply a force to the surface opposite to the reflecting surface, a plurality of second actuators each having rigidity lower than that of the first actuator, and configured to apply a force to the surface opposite to the reflecting surface, a sensor configured to detect information indicating a driving status of each of the plurality of first actuators, and a control unit configured to control, based on an output of the sensor, driving of each of the plurality of first actuators and driving of each of the plurality of second actuators so that a shape of the reflecting surface is changed to a target shape.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.