Choshoku Sai
10Patents
4h-index
6Co-inventors
49Inventor score
Filing activity: Jun 12, 2001 → Jul 11, 2018
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7443619B2 | Optical element holding apparatus, exposure apparatus and device manufacturing method | Physics | 10 | Active |
| US7232257B2 | Hydrostatic bearing and stage apparatus using same | Mechanical Engineering; Lighting; Heating | 7 | Expired |
| US6658083B2 | Weight compensation apparatus, stage apparatus using the same, and exposure apparatus | Physics | 6 | Expired |
| US7207720B2 | Static gas bearing system, stage mechanism, exposure apparatus, and device manufacturing method | Mechanical Engineering; Lighting; Heating | 4 | Expired |
| US7771065B2 | Optical unit and exposure apparatus having the same | Physics | 3 | Expired |
| US7453623B2 | Reflecting mirror and exposure apparatus using the same | Physics | 1 | Expired |
| US10884236B2 | Optical device, projection optical system, exposure apparatus using the same, and method for manufacturing article | Physics | 1 | Active |
| US9557560B2 | Mirror unit and exposure apparatus | Physics | 0 | Active |
| US9568729B2 | Optical apparatus, projection optical system, exposure apparatus, and method of manufacturing article | Physics | 0 | Active |
| US9465294B2 | Optical apparatus, projection optical system, exposure apparatus, and method of manufacturing article | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.