System for the combined, probe-based mechanical and electrical testing of MEMS
US9575093B2 · kind B2 · utility
1Cited by
22References
22Claims
0Family size
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Key dates
| Filing date | Oct 17, 2014 |
| Grant date | Feb 21, 2017 |
| Priority date | — |
| Expiry date | Nov 30, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system for testing MEMS-structures includes a microforce sensor, two or more multi-axis micropositioning units, at least one electrical probe and a sample holder on which a MEMS-structure is mounted. At least one of the multi-axis micropositioning units is motorized and at least one additional micropositioning unit is equipped with at least one electrical probe to apply electrical signals or to measure electrical signals at one or multiple locations on the MEMS structure. The system with the aforementioned components allows a combined electrical and probe-based mechanical testing of MEMS-structures.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.