Installation fixture for elastomer bands
US9583377B2 · kind B2 · utility
1Cited by
22References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 17, 2013 |
| Grant date | Feb 28, 2017 |
| Priority date | — |
| Expiry date | Jul 4, 2035 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/53657
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An installation fixture adapted to mount an elastomer band in a mounting groove around a semiconductor substrate support used for supporting a semiconductor substrate in a plasma processing chamber is disclosed, which includes an annular ring having a vertically extending portion on an outer edge of the ring and adapted to receive the elastomer band, and a base plate configured to be attached to the annular ring, the base plate having a plurality of radially extending portions adapted to receive a plurality of mechanical fasteners at locations corresponding to mounting holes in the semiconductor substrate support.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.