Display apparatus including a thin film encapsulation layer and apparatus for and method of manufacturing the display apparatus
US9587311B2 · kind B2 · utility
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9Claims
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Key dates
| Filing date | Aug 5, 2015 |
| Grant date | Mar 7, 2017 |
| Priority date | — |
| Expiry date | Aug 5, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K2102/00
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A display apparatus and an apparatus for and method of manufacturing the display apparatus. The display apparatus includes: a substrate; a display unit formed on the substrate; and a thin film encapsulation layer formed on the display unit. The thin film encapsulation layer includes an inorganic layer, and the inorganic layer includes a first sub-inorganic layer including a compound oxide including at least two of aluminum (Al), zinc (Zn), zirconium (Zn), and hafnium (Hf).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.