Method and apparatus of operating a scanning probe microscope
US9588136B2 · kind B2 · utility
4Cited by
19References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 25, 2016 |
| Grant date | Mar 7, 2017 |
| Priority date | — |
| Expiry date | Apr 25, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q60/34
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An improved mode of AFM imaging (Peak Force Tapping (PFT) Mode) uses force as the feedback variable to reduce tip-sample interaction forces while maintaining scan speeds achievable by all existing AFM operating modes. Sample imaging and mechanical property mapping are achieved with improved resolution and high sample throughput, with the mode workable across varying environments, including gaseous, fluidic and vacuum.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.