MEMS based photonic devices and methods for forming
US9588293B2 · kind B2 · utility
1Cited by
12References
16Claims
0Family size
Assignee
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Key dates
| Filing date | Jun 25, 2015 |
| Grant date | Mar 7, 2017 |
| Priority date | — |
| Expiry date | Jul 16, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/1215
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Various particular embodiments include a primary waveguide including an end section; cantilevered waveguides, each cantilevered waveguide including an end section disposed adjacent the end section of the primary waveguide; and control pins for applying an electrical bias to the cantilevered waveguides to selectively displace the end sections of the cantilevered waveguides away from the end section of the primary waveguide.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.