Patent · US Active

Aromatic resins for underlayers

US9601325B2 · kind B2 · utility

1Cited by
4References
10Claims
0Family size

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Key dates

Filing dateJun 17, 2015
Grant dateMar 21, 2017
Priority date—
Expiry dateJun 17, 2035

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC08G2650/40
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

Aromatic resin polymers and compositions containing them are useful as underlayers in semiconductor manufacturing processes.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.