Method for calibration of an encoder scale and a lithographic apparatus
US9606458B2 · kind B2 · utility
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4References
14Claims
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Key dates
| Filing date | Sep 12, 2013 |
| Grant date | Mar 28, 2017 |
| Priority date | — |
| Expiry date | Oct 25, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70516
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for calibrating an encoder scale having an array of marks in a first direction, includes moving the encoder scale in the first direction relative to a first encoder-type sensor, a second encoder-type sensor and a third encoder-type sensor, wherein the first encoder-type sensor and the second encoder-type sensor are fixedly spaced in the first direction at a first distance relative to each other, wherein the second encoder-type sensor and the third encoder-type sensor are fixedly spaced in the first direction at a second distance relative to each other.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.