Patent · US Active

Systems, methods and computer program products for signature detection

US9613255B2 · kind B2 · utility

8Cited by

7References

20Claims

0Family size

Assignee

Applied Materials Israel Ltd. · IL

Inventors

Moshe Amzaleg · Beer Sheva, IL
Ariel Shkalim · Gat, IL
Efrat Rozenman · Gdera, IL

Key dates

Filing date	Mar 30, 2015
Grant date	Apr 4, 2017
Priority date	—
Expiry date	Sep 9, 2035

Classification

Technology area (CPC G)Physics
CPC primaryG06T2207/30148
WIPO fieldComputer technology
WIPO sectorElectrical engineering

Abstract

Methods, systems, and computer program products for signature detection. One example of a method includes: acquiring an article defect density map comprising a plurality of sections corresponding to a first resolution level which is indicative of defect numbers for the sections, and determining a distribution representative of the defect numbers or function thereof; determining a threshold in accordance with said distribution, and identifying sections, out of said plurality of sections in the article defect density map, with defect numbers or function thereof above the threshold; and clustering at least part of adjoining identified sections, into one or more signatures, thus detecting said one or more signatures.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.