Protective film detecting apparatus and protective film detecting method
US9613415B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 28, 2015 |
| Grant date | Apr 4, 2017 |
| Priority date | — |
| Expiry date | Oct 28, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30148
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
Disclosed herein is a protective film detecting method including the steps of supplying a mist to a work surface of a workpiece in the condition where the work surface is coated with a protective film, applying light to the work surface of the workpiece, imaging the work surface of the workpiece after supplying the mist, and detecting an uncoated area where the protective film is not formed, by using a difference in light intensity between a coated area where the protective film is formed and the uncoated area where the protective film is not formed to cause the formation of asperities due to droplets formed from the mist supplied to the work surface of the workpiece and the occurrence of Mie scattering of the light applied to the asperities, the difference in light intensity being detected from an image obtained in the imaging step.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.