Semiconductor device and method for detecting damaging of a semiconductor device
US9618561B2 · kind B2 · utility
1Cited by
3References
19Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 5, 2014 |
| Grant date | Apr 11, 2017 |
| Priority date | — |
| Expiry date | Feb 2, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/34
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A micro-electro-mechanical device includes a movable structure. The movable structure includes a test structure changing an electrical characteristic, if the movable structure is damaged. Further, a method for detecting damaging of a micro-electro-mechanical device includes detecting a change of an electrical characteristic of the electrical test structure of the movable structure. Further, the method includes indicating a deviation of the electrical characteristic from a predefined tolerable range.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.