Micromirror and manufacturing method for at least one micromirror which is situatable or situated in a micromirror device

US9618740B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Simon Armbruster · Wannweil, DE
• Helmut Grutzeck · Tübingen, DE
• Joerg Muchow · Reutlingen, DE
• Frederic Njikam Njimonzie · Reutlingen, DE
• Johannes Baader · Glückstadt, DE
• Stefan Pinter · Reutlingen, DE
• Rainer Straub · Entringen, DE
• Zoltan Lestyan · Martonvásár, HU

Key dates

• Filing date: Nov 25, 2014
• Grant date: Apr 11, 2017
• Expiry date: Jan 17, 2035

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B26/0858
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A micromirror for a micromirror device includes: a mirror side; and a back side which is directed away from the mirror side, at least one central area of the back side having at least one surface which is plane parallel to the mirror side, the back side being shaped in such a way that on two opposite sides of the central area, a side area having at least one side surface of the back side in each case, which is curved and/or oriented inclined toward the mirror side borders on the central area of the back side, and a height of the micromirror continuously decreasing starting from the central area along a cross section of the micromirror, which runs through the central area and the two side areas.