Reactive depletion of reactor deposits in harvesting polycrystalline silicon rods

US9620359B2 · kind B2 · utility

Assignee

• Wacker Chemie AG · DE

Inventors

• Barbara Mueller · Langenau, DE
• Thomas Koch · Sachsenhagen, DE

Key dates

• Filing date: Jan 13, 2014
• Grant date: Apr 11, 2017
• Expiry date: Jan 13, 2034

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/02532
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

The Siemens process for deposition of polycrystalline silicon in the form of rods in a sealed reactor is improved by, after introduction of deposition gas has ceased, introducing a ventilating gas into the partially sealed reactor, withdrawing a gas stream from the reactor, and monitoring the components in the gas stream withdrawn until a desired concentration of one or more components is reached, and opening the reactor to remove the rods.